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 |  موضوع: كتاب Precision Nanometrology - Sensors and Measuring Systems for Nanomanufacturing الإثنين 20 مارس 2023, 5:58 am | |
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أخواني في الله
أحضرت لكم كتاب
Precision Nanometrology - Sensors and Measuring Systems for Nanomanufacturing
Wei Gao
و المحتوى كما يلي :
Contents
1 Angle Sensor for Measurement of Surface Slope and Tilt Motion . 1
1.1 Introduction 1
1.2 Angle Sensor with Quadrant Photodiode . 2
1.3 Angle Sensor with Photodiode Array 15
1.4 Angle Sensor with Single-cell Photodiode 28
1.5 Summary 31
1.6 References 33
2 Laser Autocollimator for Measurement of Multi-axis Tilt Motion 35
2.1 Introduction 35
2.2 Two-axis Laser Autocollimator . 36
2.3 One-lens Laser Micro-autocollimator 53
2.4 Three-axis Laser Autocollimator . 56
2.5 Summary 67
2.6 References 67
3 Surface Encoder for Measurement of In-plane Motion 69
3.1 Introduction 69
3.2 Surface Encoder for MDOF In-plane Motion 70
3.2.1 Multi-probe-type MDOF Surface Encoder . 70
3.2.2 Scanning Laser Beam-type MDOF Surface Encoder . 83
3.3 Fabrication of Two-axis Sinusoidal Grid for Surface Encoder 90
3.3.1 Fabrication System . 90
3.3.2 Analysis and Compensation of Fabrication Error . 91
3.4 Application of Surface Encoder in Surface Motor-driven Planar Stage 99
3.4.1 Stage System 99
3.4.2 Stage Performance 104
3.5 Summary 107
3.6 References 107xii Contents
4 Grating Encoder for Measurement of In-plane
and Out-of-plane Motion 109
4.1 Introduction 109
4.2 Two-degree-of-freedom Linear Grating Encoder 110
4.3 Three-axis Grating Encoder with Sinusoidal Grid . 129
4.4 Three-axis Grating Encoder with Rectangular XY-grid 136
4.5 Summary 140
4.6 References 140
5 Scanning Multi-probe System for Measurement of Roundness . 143
5.1 Introduction 143
5.2 Three-slope Sensor Method .144
5.3 Mixed Method . 157
5.4 Summary 169
5.5 References 173
6 Scanning Error Separation System for Measurement
of Straightness . 175
6.1 Introduction 175
6.2 Three-displacement Sensor Method with Self Zero-adjustment 175
6.2.1 Three-displacement Sensor Method and Zero-adjustment Error 175
6.2.2 Three-displacement Sensor Method with Self Zero-adjustment . 180
6.3 Error Separation Method for Machine Tool Slide 195
6.3.1 Slide Straightness Error of Precision Machine Tool . 195
6.3.2 Error Separation Method for Slide Straightness Measurement 195
6.4 Summary 208
6.5 References 210
7 Scanning Micro-stylus System for Measurement
of Micro-aspherics 211
7.1 Introduction 211
7.2 Compensation of Scanning Error Motion 212
7.3 Micro-stylus Probe . 225
7.3.1 Micro-ball Glass Tube Stylus . 225
7.3.2 Tapping-type Micro-stylus . 233
7.4 Small-size Measuring Instrument for Micro-aspherics 237
7.5 Summary 242
7.6 References 242
8 Large Area Scanning Probe Microscope for Micro-textured Surfaces 245
8.1 Introduction 245
8.2 Capacitive Sensor-compensated Scanning Probe Microscope . 246
8.3 Linear Encoder-compensated Scanning Probe Microscope . 258
8.4 Spiral Scanning Probe Microscope 266
8.5 Summary 279
8.6 References 281Contents xiii
9 Automatic Alignment Scanning Probe Microscope System
for Measurement of 3D Nanostructures . 283
9.1 Introduction 283
9.2 Optical Probe for Automatic Alignment 285
9.2.1 Alignment Principle 285
9.2.2 Alignment Procedure 288
9.3 Instrumentation of the Automatic Alignment AFM . 299
9.3.1 Instrument Design 299
9.3.2 Instrument Performance . 305
9.4 Summary 317
9.5 References 318
10 Scanning Image-sensor System for Measurement
of Micro-dimensions . 321
10.1 Introduction 321
10.2 Micro-width Measurement by Scanning Area-image Sensor 322
10.2.1 Micro-width of Long Tool Slit . 322
10.2.2 Evaluation of Slit Width . 323
10.2.3 Scanning Area-image Sensor 327
10.2.4 Slit Width Measurement in Production Line 331
10.3 Micro-radius Measurement by Scanning Line-image Sensor 335
10.3.1 Micro-radius of Long Tool Edge 335
10.3.2 Evaluation of Edge Radius . 336
10.3.3 Edge Radius Measurement in Production Line 341
10.4 Summary 350
10.5 References 351
Index 35
Index
Abbe error, 35, 109, 238, 246, 260
acceleration, 8, 100
accuracy, 69, 74, 85, 143, 179, 180,
187, 191, 195, 208, 211, 217, 230,
246, 283, 318, 322, 323, 335, 339
aerostatic bearing, 8, 248, 270
AFM cantilever, 246, 247, 249, 250–
252, 272, 273, 277, 280, 284,
298–301, 304, 305, 310, 312, 314,
317, 318
air-slide, 8, 12, 74, 217, 270
air-spindle, 12, 74, 154, 169, 217, 270
amplifier, 4, 103, 249, 256, 303, 305,
307
angular distance, 160, 163, 164, 165,
169
anti-vibration, 187
aperture, 17, 62, 71, 79, 87, 110,
115,242, 301, 336
bandwidth, 1, 23, 35, 74, 97, 116, 134,
260
beam profiler, 17, 302
beam waist, 43, 285, 288, 290, 295,
298, 302, 307, 312, 317
binary image, 323, 325, 326, 330, 350
calibration, 1, 6, 7, 17, 74, 141, 165,
166, 167, 339, 350
charge constant, 236
circular beam, 25, 47, 50, 52
coil, 99, 100, 102, 103
collimation lens, 301
cone angle, 225, 226, 227, 229, 232,
300
contact force, 252, 310
defocus, 323, 327, 330, 341, 344, 350
depth of cut, 90
diamond chip, 312
diamond turning, 90, 97, 107, 132,
195, 201, 217, 279, 280
die, 322, 335
diffraction angle, 56, 110, 132, 136
digitization, 95, 96, 97, 99, 107
divergence, 53, 301
dynamic range, 1, 4, 256, 260
electrode, 19, 217
ellipsoidal beam, 47, 51
fast-tool-servo, 90, 95, 107, 132, 140
feedback control, 69, 109, 249, 262
filament lamp, 1, 35
force curve, 252, 310, 253, 311
Fourier transform, 92, 147, 150, 159,
160, 162–164
frequency response, 260, 235, 261
function generator 87, 303
gage block, 1
Gaussian beam, 53
Gaussian distribution, 17, 39
glass tube, 225, 228–232, 242354 Index
graduation, 74, 75
grinding machine, 211, 322, 331
guideway, 1
harmonic sensitivity, 147, 150,151,
159, 160, 162, 163
humidity, 69
hysteresis, 253
inertial, 102
interference microscope, 91, 92, 107,
245, 256
interpolation, 74, 76, 120–122, 140
laser interferometer, 69, 87, 109
lateral resolution, 1, 268, 272
lathe, 195, 196, 197, 202, 203, 208
lighting unit, 339
linear encoder, 12, 69, 109, 110, 115,
116, 120, 123, 124, 129, 130, 140,
217, 238, 245, 249, 256, 258–260,
262, 265, 271, 271, 279, 280
linear motor, 12, 99–103, 107, 248,
249, 262
linearity, 4, 134, 300, 318
lock-in amplifier, 303, 305, 307
magnet, 99–101
mass, 102, 233, 234
mould, 211, 212
non-linearity, 17, 25, 74, 187, 260
optical lever, 2
optical path, 69, 110–112, 130
parabolic error, 176, 178, 182, 191
phase difference, 71, 74, 112, 114,
115, 130
photolithography, 69, 136, 137, 140
PID controller, 103, 304
piezoelectric coefficient, 252
pin gauge, 339–141, 350
piezo-resistive, 248, 250–252, 258,
281, 300, 301, 304, 310, 314
Poisson's ratio, 236
repeatability, 74, 143, 169, 192, 193,
203, 217–219, 314, 334, 344, 348,
349
resonant frequency, 300
rotary encoder, 12, 69, 90, 91, 95, 97,
169, 217, 218, 238, 271, 272
rotary index table, 1
scanning electron microscope, 136,
245, 283
servo control, 299, 310, 314, 330
servo motor, 187, 300, 305, 307
signal to noise ratio, 4, 43
silicon wafer, 1, 10–13, 15, 33
spatial frequency, 92, 95, 147, 150
spatial wavelength, 92, 177
speed, 2, 35, 69, 83, 90, 91, 97, 107,
157, 208, 211, 218, 256, 262, 271,
277, 300, 321, 327
stability, 169, 187, 191, 238, 260, 344
stator, 99–101, 103
stepping motor, 25, 248, 249, 262,
339, 341
stiffness, 101, 225, 238, 252, 279,
280
temperature, 69, 225, 226, 229, 238,
250, 260
thickness gauge, 322, 323, 332, 333
threshold, 325, 330, 331, 338, 350
thrust force, 100, 102
tolerance, 120
track pitch, 97
transfer function, 146, 147, 150, 151,
159, 150, 162
uncertainty, 4
vacuum, 12, 69, 90, 217, 270, 284
vibration, 116–119 139, 169, 187,
217, 218, 221, 238, 139, 334
wear, 95, 283
Wheatstone bridge, 249, 250, 252
working distance, 115, 125, 284, 301,
339
Young's modulus, 236, 252
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