كتاب The Materials Science of Thin Films

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The Materials Science of Thin Films

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Review of Materials Science
Introduction
Structure
Defects in Solids
Bonding of Materials
Thermodynamics of Materials
Kinetics
Nucleation
Conclusion
Exercises
References
Chapter
Vacuum Science and Technology
Kinetic Theory of Gases
Gas Transport and Pumping
Vacuum Pumps and Systems
Excercises
References
Chapter
Introduction
Physical Vapor Deposition
The Physics and Chemistry of Evaporation
Film Thickness Uniformity and Purity
Evaporation Hardware and Techniques
Glow Discharges and Plasmas
Sputtering
Sputtering Processes
Hybrid and Modified PVD Processes
Exercises
References
Chapter
Chemical Vapor Deposition
Introduction
Reaction Types
Thermodynamics of CVD
Gas Transport
Growth Kinetics
CVD Processes and Systems
Exercises
References
Chapter
Film Formation and Structure
Introduction
Capillarity Theory
Atomistic Nucleation Processes
Cluster Coalescence and Depletion
Experimental Studies of Nucleation and Growth
Grain Structure of Films and Coatings
Amorphous Thin Films
Exercises
References
Chapter
Characterization of Thin Films
Introduction
Film Thickness
Structural Characterization
Chemical Characterization
Exercises
References
Chapter
Epitaxy
Introduction
Structural Aspects of Epitaxial Films
Lattice Misfit and Imperfections in Epitaxial Films
Epitaxy of Compound Semiconductors
Methods for Depositing Epitaxial Semiconductor Films
Epitaxial Film Growth and Characterization
Conclusion
Exercises
References
Chapter
Interdiffusion and Reactions in Thin Films
Introduction
Fundamentals of Diffusion
Interdiffusion in Metal Alloy Films
Electromigration in Thin Films
Metal-Semiconductor Reactions
Silicides and Diffusion Barriers
Exercises
References
Diffusion During Film Growth
Chapter
Mechanical Properties of Thin Films
Introduction
Introduction to Elasticity Plasticity and Mechanical Behavior
Internal Stresses and Their Analysis
Stress in Thin Films
Relaxation Effects in Stressed Films
Adhesion
Exercises
References
Chapter
Electrical and Magnetic Properties of Thin Films
Introduction to Electrical Properties of Thin Films
Conduction in Metal Films
Electrical Transport in Insulating Films
Semiconductor Contacts and MOS Structures
Superconductivity in Thin Films
Introduction to Ferromagnetism
Temperature
Magnetic Thin Films for Memory Applications
Exercises
References
Magnetic Film Size Effects - M, versus Thickness and
Chapter
Optical Properties of Thin Films
Introduction
Properties of Optical Film Materials
Thin-Film Optics
Multilayer Optical Film Applications
Exercises
References
Chapter
Metallurgical and Protective Coatings
Introduction
Hard Coating Materials
Hardness and Fracture
Tribology of Films and Coatings
Diffusional, Protective, and Thermal Coatings
Exercises
References
Chapter
Modification of Surfaces and Films
Introduction
Lasers and Their Interactions with Surfaces
Ion-Implantation Effects in Solids
Ion-Beam Modification Phenomena and Applications
Exercises
References
Chapter
Emerging Thin-Film Materials and Applications
Film-Patterning Techniques
Diamond Films
High-T, Superconductor Films
Films for Magnetic Recording
Optical Recording
Integrated Optics
Superlattices
Band-Gap Engineering and Quantum Devices
Conclusion
Exercises
References
Appendix
Physical Constants
Appendix
Selected Conversions
index

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